JPH01180190U - - Google Patents
Info
- Publication number
- JPH01180190U JPH01180190U JP7404888U JP7404888U JPH01180190U JP H01180190 U JPH01180190 U JP H01180190U JP 7404888 U JP7404888 U JP 7404888U JP 7404888 U JP7404888 U JP 7404888U JP H01180190 U JPH01180190 U JP H01180190U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- adsorption plate
- protective layer
- support layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 6
- 239000011241 protective layer Substances 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 229920001169 thermoplastic Polymers 0.000 claims description 4
- 239000004416 thermosoftening plastic Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 description 2
Landscapes
- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7404888U JPH01180190U (en]) | 1988-06-03 | 1988-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7404888U JPH01180190U (en]) | 1988-06-03 | 1988-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01180190U true JPH01180190U (en]) | 1989-12-25 |
Family
ID=31299168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7404888U Pending JPH01180190U (en]) | 1988-06-03 | 1988-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01180190U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177818A (ja) * | 1985-11-27 | 1987-08-04 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | 多層静電容量式膜型鍵盤 |
-
1988
- 1988-06-03 JP JP7404888U patent/JPH01180190U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177818A (ja) * | 1985-11-27 | 1987-08-04 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | 多層静電容量式膜型鍵盤 |